Patent Assignment
Reel/Frame 016195/0003
Assignment of Assignor's Interest
Recorded: 2005-06-28
Pages: 6
Assignors
GEH, BERND
Executed: 2002-10-23
GRAUPNER, PAUL
Executed: 2002-10-02
STAMMLER, THOMAS
Executed: 2002-10-23
STENKAMP, DIRK
Executed: 2002-10-10
STUHLER, JOCHEN
Executed: 2002-10-09
WURMBRAND, KLAUS
Executed: 2002-10-10
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES
CARL-ZEISS-STR.22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Optimizing the Image Properties of at Least Two Optical Elements as Well as Methods for Optimizing the Image Properties of at Least Three Optical Elements
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.