Patent Assignment
Reel/Frame 016076/0237
Assignment of Assignor's Interest
Recorded: 2004-12-15
Pages: 3
Assignors
LAIDIG, THOMAS
Executed: 2004-12-07
WAMPLER, KURT E.
Executed: 2004-12-07
VAN DEN BROEKE, DOUGLAS
Executed: 2004-12-03
CHEN, JANG FUNG
Executed: 2004-12-03
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Scattering Bar Opc Application Method for Sub-Half Wavelength Lithography Patterning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.