IP Library › Assignment 016277/0888
Patent Assignment
Reel/Frame 016277/0888

Assignment of Assignor's Interest

Recorded: 2005-05-26 Pages: 5
Assignors
JANOS, ALAN
Executed: 2005-01-24
SAUBHAYANA, MONTIEN
Executed: 2005-04-20
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
In-Situ Absolute Measurement Process and Apparatus for Film Thickness, Film Removal Rate, and Removal Endpoint Prediction
Patent: 7,821,655 →
Application: 11/053,731 →
Publication: US 2006/0082785
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
First Amendment to Security Agreement May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →