Patent Assignment
Reel/Frame 016857/0978
Assignment of Assignor's Interest
Recorded: 2005-12-06
Pages: 5
Assignors
SCHMIDT, SEBASTIAN
Executed: 2005-11-01
SCHNEIDER, JENS
Executed: 2005-11-01
ROESCH, GUILLAUME
Executed: 2005-10-28
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STR. 53, MUNICH, 81669, GERMANY
Covered Property
(1)
Exposure Device for Immersion Lithography and Method for Monitoring Parameters of an Exposure Device for Immersion Lithography
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 14, 2010
From: INFINEON TECHNOLOGIES AG
To: QIMONDA AG
Reel/Frame 023806/0001 →
Assignment of Assignor's Interest
May 8, 2015
From: QIMONDA AG
To: INFINEON TECHNOLOGIES AG
Reel/Frame 035623/0001 →
Assignment of Assignor's Interest
Oct 19, 2015
From: INFINEON TECHNOLOGIES AG
To: POLARIS INNOVATIONS LIMITED
Reel/Frame 036888/0745 →