Patent Assignment
Reel/Frame 017994/0331
Assignment of Assignor's Interest
Recorded: 2006-06-14
Pages: 2
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8688, JAPAN
Covered Property
(1)
Method for treating vapor deposition apparatus, method for depositing thin film, vapor deposition apparatus and computer program product for achieving thereof
Application:
11/452,247 →
Publication:
US 2006/0280868
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.