Patent Assignment
Reel/Frame 018438/0696
Assignment of Assignor's Interest
Recorded: 2006-10-19
Pages: 3
Assignors
CHEN, JUNG FUNG
Executed: 2006-10-05
HSU, DUAN-FU STEPHEN
Executed: 2006-10-05
VAN DEN BROEKE, DOUGLAS
Executed: 2006-10-05
LAIDIG, THOMAS
Executed: 2006-10-09
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Performing Mask Feature Pitch Decomposition for Use in a Multiple Exposure Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.