Assignment of Assignor's Interest

Recorded: 2007-08-07 Pages: 3

Assignors

TANAKA, MASAHIKO

Executed: 2001-05-11

IKEMOTO, MANABU

Executed: 2001-05-09

YOKOGAWA, NAOAKI

Executed: 2001-05-09

Assignee

ANELVA CORPORATION

5-8-1, YOTSUYA, FUCHU-SHI, TOKYO, 183, JAPAN

Covered Property (1)

Thin-Film Disposition Apparatus

Application: 11/834,717 →

Publication: US 2008/0017500

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.