Patent Assignment
Reel/Frame 019802/0105
Assignment of Assignor's Interest
Recorded: 2007-09-10
Pages: 6
Assignors
KELLERMAN, PETER L.
Executed: 2007-06-25
BENVENISTE, VICTOR M.
Executed: 2007-09-07
PEREL, ALEXANDER S.
Executed: 2007-06-25
FREER, BRIAN S.
Executed: 2007-04-25
GRAF, MICHAEL A.
Executed: 2007-04-25
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Methods and Systems for Trapping Ion Beam Particles and Focusing an Ion Beam
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →