Patent Assignment
Reel/Frame 020712/0723
Assignment of Assignor's Interest
Recorded: 2008-03-27
Pages: 3
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D73447, GERMANY
Covered Property
(1)
Projection Exposure System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.