Patent Assignment
Reel/Frame 020726/0445
Change of Name
Recorded: 2008-03-31
Pages: 3
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Projection Exposure System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.