Patent Assignment
Reel/Frame 021545/0613
Assignment of Assignor's Interest
Recorded: 2008-09-17
Pages: 5
Assignors
GRAF, MICHAEL A.
Executed: 2008-09-16
VANDERBERG, BO H.
Executed: 2008-09-09
EISNER, EDWARD
Executed: 2008-09-11
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Adjustable Deflection Optics for Ion Implantation
Application:
12/212,507 →
Publication:
US 2010/0065761
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →