Patent Assignment
Reel/Frame 021872/0346
Assignment of Assignor's Interest
Recorded: 2008-11-21
Pages: 4
Assignors
LUO, SHIJIAN
Executed: 2008-11-20
ESCORCIA, ORLANDO
Executed: 2008-11-20
WALDFRIED, CARLO
Executed: 2008-11-20
BERRY, IVAN
Executed: 2008-11-20
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Front End of Line Plasma Mediated Ashing Processes and Apparatus
Application:
12/275,394 →
Publication:
US 2010/0130017
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →