Patent Assignment
Reel/Frame 022233/0770
Assignment of Assignor's Interest
Recorded: 2009-02-10
Pages: 4
Assignees
CANON ANELVA ENGINEERING CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Heating Apparatus, Heating Method, and Semiconductor Device Manufcaturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.