Patent Assignment
Reel/Frame 022541/0239
Assignment of Assignor's Interest
Recorded: 2009-04-14
Pages: 5
Assignors
TIEGER, DANIEL, MR.
Executed: 2009-04-10
DIVERGILIO, WILLIAM, MR.
Executed: 2009-04-10
EISNER, EDWARD, MR.
Executed: 2009-04-10
GRAF, MICHAEL, MR.
Executed: 2009-04-13
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Ion Source with Adjustable Aperture
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →