Patent Assignment
Reel/Frame 022647/0677
Assignment of Assignor's Interest
Recorded: 2009-05-06
Pages: 4
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Process for Treatment of Semiconductor Wafer Using Water Vapor Containing Environment
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.