Patent Assignment
Reel/Frame 023606/0328
Assignment of Assignor's Interest
Recorded: 2009-12-04
Pages: 5
Assignors
GEISSBUHLER, PHILLIP
Executed: 2009-12-03
BERRY, IVAN
Executed: 2009-12-01
HUSEINOVIC, ARMIN
Executed: 2009-12-03
LUO, SHIJIAN
Executed: 2009-12-01
SRIVASTAVA, ASEEM KUMAR
Executed: 2009-12-02
WALDFRIED, CARLO
Executed: 2009-12-03
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
Application:
12/631,117 →
Publication:
US 2011/0136346
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →