IP Library › Assignment 023732/0754
Patent Assignment
Reel/Frame 023732/0754

Assignment of Assignor's Interest

Recorded: 2010-01-05 Pages: 3
Assignors
SRIVASTAVA, ASEEM K.
Executed: 2009-12-04
COUILLIARD, ROBERT P.
Executed: 2009-12-04
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Tuning Hardware for Plasma Ashing Apparatus and Methods of Use Thereof
Patent: 8,906,195 →
Application: 12/621,136 →
Publication: US 2011/0114115
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →