Patent Assignment
Reel/Frame 023895/0493
Assignment of Assignor's Interest
Recorded: 2010-02-04
Pages: 4
Assignors
MASAKI, NOBUYUKI
Executed: 2010-01-22
SASUGA, YUICHI
Executed: 2010-01-22
SHIBAGAKI, MASAMI
Executed: 2010-01-21
DOI, HIROSHI
Executed: 2010-01-20
Assignees
CANON ANELVA CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
CANON ANELVA ENGINEERING CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Annealing Method, and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.