Assignment of Assignor's Interest

Recorded: 2010-03-26 Pages: 4

Assignor

YAMANE, TAKASHI

Executed: 2010-03-17

Assignee

NEC ELECTRONICS CORPORATION

1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, KANAGAWA, 211-8668, JAPAN

Covered Property (1)

Plasma processing apparatus, fault detection apparatus, and fault detection method

Application: 12/659,989 →

Publication: US 2010/0262302

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.