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App. No. 12/659,989 · Confirmation No. 4842

Plasma processing apparatus, fault detection apparatus, and fault detection method

Inventor: Takashi Yamane
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2013-04-19 ABN Abandonment 2 View
2012-07-30 CTNF Non-Final Rejection 11 View
2012-07-30 892 List of references cited by examiner 1 View
2012-07-30 BIB Bibliographic Data Sheet 1 View
2012-07-30 SRNT Examiner's search strategy and results 7 View
2012-07-30 1449 List of References cited by applicant and considered by examiner 1 View
2012-07-30 SRFW Search information including classification, databases and other search related notes 1 View
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2010-10-14 NTC.PUB Notice of Publication 1 View
2010-05-18 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 15 View
2010-04-26 APP.FILE.REC Filing Receipt 3 View
2010-03-26 TRNA Transmittal of New Application 8 View
2010-03-26 SPEC Specification 16 View
2010-03-26 CLM Claims 5 View
2010-03-26 ABST Abstract 1 View
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2010-03-26 OATH Oath or Declaration filed 2 View
2010-03-26 TRAN.LET Transmittal Letter 1 View
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Quick Facts
App. No.
12/659,989
Filed
2010-03-26
Pub. No.
US20100262302A1
Examiner
LIN, JASON
Art Unit
2121