Patent Assignment
Reel/Frame 024368/0587
Assignment of Assignor's Interest
Recorded: 2010-05-11
Pages: 4
Assignee
NANOGEOMETRY RESEARCH INC.
7F NK SHIMURASAKAUE BLDG, 3-6-7 AZUSAWA, ITABASHI-KU, TOKYO, 174-0051, JAPAN
Covered Property
(1)
System and Method for a Semiconductor Lithographic Process Control Using Statistical Information in Defect Identification
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.