Patent Assignment
Reel/Frame 024605/0103
Assignment of Assignor's Interest
Recorded: 2010-06-28
Pages: 2
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU,, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Alignment Apparatus, Substrates Stacking Apparatus, Stacked Substrates Manufacturing Apparatus, Exposure Apparatus and Alignment Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.