Assignment of Assignor's Interest

Recorded: 2010-11-24 Pages: 2

Assignor

MENGEL, MARKUS

Executed: 2010-08-10

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical System for a Microlithographic Projection Exposure Apparatus and Microlithographic Exposure Method

Application: 12/851,074 →

Publication: US 2011/0063597

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.