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App. No. 12/851,074 · Confirmation No. 1037

OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MICROLITHOGRAPHIC EXPOSURE METHOD

Inventor: Markus Mengel
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2013-01-16 ABN Abandonment 2 View
2012-07-26 CTAV Advisory Action (PTOL-303) 3 View
2012-07-26 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2012-07-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-07-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2012-07-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-07-13 CTAV Advisory Action (PTOL-303) 3 View
2012-07-13 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2012-06-27 A.NE Response After Final Action 1 View
2012-06-27 CLM Claims 6 View
2012-06-27 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-06-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-06-27 WFEE Fee Worksheet (SB06) 1 View
2012-06-22 CTFR Final Rejection 16 View
2012-06-22 SRFW Search information including classification, databases and other search related notes 1 View
2012-06-22 1449 List of References cited by applicant and considered by examiner 2 View
2012-06-22 SRNT Examiner's search strategy and results 2 View
2012-06-22 1449 List of References cited by applicant and considered by examiner 1 View
2012-05-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-05-22 CLM Claims 6 View
2012-05-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-05-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-05-22 WFEE Fee Worksheet (SB06) 1 View
2012-05-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2012-05-09 FOR Foreign Reference 26 View
2012-05-09 TRAN.LET Transmittal Letter 1 View
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2012-05-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-05-01 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2012-05-01 FOR Foreign Reference 5 View
2012-05-01 FOR Foreign Reference 11 View
2012-05-01 FOR Foreign Reference 11 View
2012-05-01 FOR Foreign Reference 4 View
2012-05-01 FOR Foreign Reference 14 View
2012-05-01 FOR Foreign Reference 30 View
2012-05-01 FOR Foreign Reference 42 View
2012-05-01 WFEE Fee Worksheet (SB06) 2 View
2012-05-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-05-01 TRAN.LET Transmittal Letter 1 View
2012-05-01 136A Authorization for Extension of Time all replies 3 View
2012-04-04 CTNF Non-Final Rejection 14 View
2012-04-04 892 List of references cited by examiner 1 View
2012-04-04 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-04 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-04 SRFW Search information including classification, databases and other search related notes 1 View
2012-04-04 SRNT Examiner's search strategy and results 7 View
2011-12-01 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-12-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-12-01 TRAN.LET Transmittal Letter 1 View
2011-03-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-03-21 PA.. Power of Attorney 2 View
2011-03-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-17 NTC.PUB Notice of Publication 1 View
2010-12-07 WFEE Fee Worksheet (SB06) 1 View
2010-12-07 APP.FILE.REC Filing Receipt 3 View
2010-11-24 WFEE Fee Worksheet (SB06) 1 View
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2010-11-24 NTC.MISS.PRT Notice to File Missing Parts 2 View
2010-11-24 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2010-11-24 OATH Oath or Declaration filed 3 View
2010-11-24 WFEE Fee Worksheet (SB06) 2 View
2010-11-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-09-13 FRPR Certified Copy of Foreign Priority Application 25 View
2010-09-13 TRAN.LET Transmittal Letter 1 View
2010-08-05 TRNA Transmittal of New Application 2 View
2010-08-05 ADS Application Data Sheet 4 View
2010-08-05 TRAN.LET Transmittal Letter 1 View
2010-08-05 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-08-05 FOR Foreign Reference 17 View
2010-08-05 FOR Foreign Reference 19 View
2010-08-05 FOR Foreign Reference 22 View
2010-08-05 FOR Foreign Reference 39 View
2010-08-05 FOR Foreign Reference 62 View
2010-08-05 FOR Foreign Reference 57 View
2010-08-05 FOR Foreign Reference 86 View
2010-08-05 SPEC Specification 16 View
2010-08-05 CLM Claims 5 View
2010-08-05 ABST Abstract 1 View
2010-08-05 DRW Drawings-only black and white line drawings 6 View
2010-08-05 371P Documents submitted with 371 (National Stage) Applications 13 View
2010-08-05 WFEE Fee Worksheet (SB06) 2 View
2010-08-05 N417 Electronic Filing System Acknowledgment Receipt 4 View
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Quick Facts
App. No.
12/851,074
Filed
2010-08-05
Pub. No.
US20110063597A1
Art Unit
2882