Patent Assignment
Reel/Frame 029022/0204
Assignment of Assignor's Interest
Recorded: 2012-09-25
Pages: 2
Assignors
YUKI, DAISUKE
Executed: 2012-09-10
MIIKE, TAKAHIRO
Executed: 2012-09-07
MORI, HIROSHI
Executed: 2012-09-07
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Pair of Substrate Holders, Substrate Holder, Substrate Bonding Apparatus and Method for Manufacturing Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.