Patent Assignment
Reel/Frame 029608/0610
Assignment of Assignor's Interest
Recorded: 2013-01-10
Pages: 3
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus Controlling Wafer Holding Section Temperature to Be Lower Than Imersion Liquid Temperature
Application:
12/824,793 →
Publication:
US 2010/0265477
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.