Change of Name

Recorded: 2013-01-10 Pages: 3

Assignor

Executed: 2008-10-01

Assignee

PANASONIC CORPORATION

1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN

Covered Property (1)

Semiconductor Manufacturing Apparatus Controlling Wafer Holding Section Temperature to Be Lower Than Imersion Liquid Temperature

Application: 12/824,793 →

Publication: US 2010/0265477

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.