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App. No. 12/824,793 · Confirmation No. 1529

SEMICONDUCTOR MANUFACTURING APPARATUS CONTROLLING WAFER HOLDING SECTION TEMPERATURE TO BE LOWER THAN IMERSION LIQUID TEMPERATURE

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2014-03-20 WFEE Fee Worksheet (SB06) 2 View
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2014-03-20 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-03-20 CLM Claims 4 View
2014-03-20 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-03-20 WFEE Fee Worksheet (SB06) 1 View
2014-02-07 CTFR Final Rejection 7 View
2014-02-07 SRNT Examiner's search strategy and results 2 View
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2014-01-29 DISQ Terminal Disclaimer review decision 1 View
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2014-01-03 SPEC Specification 1 View
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2013-03-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-02-15 PA.. Power of Attorney 2 View
2013-02-15 TRAN.LET Transmittal Letter 1 View
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2010-10-21 NTC.PUB Notice of Publication 1 View
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2010-06-28 SPEC Specification 18 View
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2010-06-28 ABST Abstract 1 View
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2010-06-28 OATH Oath or Declaration filed 3 View
2010-06-28 A.PE Preliminary Amendment 1 View
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2010-06-28 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2010-06-28 WFEE Fee Worksheet (SB06) 1 View
2010-06-28 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/824,793
Filed
2010-06-28
Pub. No.
US20100265477A1
Art Unit
2882