Patent Assignment
Reel/Frame 033206/0010
Assignment of Assignor's Interest
Recorded: 2014-06-28
Pages: 14
Assignors
JUNG-KUBIAK, CECILE
Executed: 2014-06-09
RECK, THEODORE J.
Executed: 2014-06-09
CHATTOPADHYAY, GOUTAM
Executed: 2014-04-17
PEREZ, JOSE VICENTE SILES
Executed: 2014-06-24
LIN, ROBERT H.
Executed: 2014-04-15
MEHDI, IMRAN
Executed: 2014-06-11
LEE, CHOONSUP
Executed: 2014-04-16
COOPER, KEN B.
Executed: 2014-06-09
PERALTA, ALEJANDRO
Executed: 2014-04-23
Assignee
CALIFORNIA INSTITUTE OF TECHNOLOGY
1200 EAST CALIFORNIA BOULEVARD, PASADENA, CALIFORNIA, 91125
Covered Property
(1)
Multi-Step Deep Reactive Ion Etching Fabrication Process for Silicon-Based Terahertz Components
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.