Patent Assignment
Reel/Frame 033244/0386
Confirmatory License
Recorded: 2014-06-12
Pages: 2
Assignor
CALIFORNIA INSTITUTE OF TECHNOLOGY
Executed: 2014-04-21
Assignee
NASA
300 E STREET, SW, WASHINGTON, DISTRICT OF COLUMBIA, 20546
Covered Property
(1)
Multi-Step Deep Reactive Ion Etching Fabrication Process for Silicon-Based Terahertz Components
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.