Patent Assignment
Reel/Frame 033413/0460
Assignment of Assignor's Interest
Recorded: 2014-07-29
Pages: 6
Assignors
HIROSE, YOSHIRO
Executed: 2014-06-24
MIZUNO, NORIKAZU
Executed: 2014-06-24
YANAGITA, KAZUTAKA
Executed: 2014-06-20
OKUBO, SHINGO
Executed: 2014-06-19
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, 75007, FRANCE
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.