Patent Assignment
Reel/Frame 040326/0705
Assignment of Assignor's Interest
Recorded: 2016-11-15
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
In-Situ Cleaning Using Hydrogen Peroxide as Co-Gas to Primary Dopant or Purge Gas for Minimizing Carbon Deposits in an Ion Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →