Patent Assignment
Reel/Frame 041196/0725
Assignment of Assignor's Interest
Recorded: 2017-02-07
Pages: 7
Assignors
LEVINSKI, VLADIMIR
Executed: 2016-10-09
PASKOVER, YURI
Executed: 2017-01-23
LUBASHEVSKY, YUVAL
Executed: 2017-02-06
MANASSEN, AMNON
Executed: 2017-01-05
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
New Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary Electromagnetic Fields
Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary EM Fields
Application:
62/215,895 →