IP Library › Patent Application 62215895
Patent Application Provisional
App. No. 62/215,895 · Confirmation No. 1029

Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary EM Fields

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2015-09-23 APP.FILE.REC Filing Receipt 3 View
2015-09-09 TR.PROV Provisional Cover Sheet (SB16) 3 View
2015-09-09 SPEC Specification 7 View
2015-09-09 WFEE Fee Worksheet (SB06) 2 View
2015-09-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
62/215,895
Filed
2015-09-09