Patent Assignment
Reel/Frame 046772/0756
Assignment of Assignor's Interest
Recorded: 2018-08-10
Pages: 14
Assignors
EHM, DIRK HEINRICH
Executed: 2018-01-29
SCHMIDT, STEFAN-WOLFGANG
Executed: 2018-02-07
LOGTENBERG, HELLA
Executed: 2018-03-15
OSORIO, EDGAR
Executed: 2018-03-15
ZELLENRATH, MARK
Executed: 2018-03-14
TE SLIGTE, EDWIN
Executed: 2018-02-12
Assignees
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
ASML NETHERLANDS B.V. CORPORATE INTELLECTUAL PROPERTY
DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
TNO SCIENCE & INDUSTRY
STIESLTJESWEG 1, DELFT, 2628 CK, NETHERLANDS
Covered Property
(1)
Euv Lithography System and Operating Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.