Patent Assignment
Reel/Frame 047046/0211
Assignment of Assignor's Interest
Recorded: 2018-09-11
Pages: 3
Assignor
TNO SCIENCE & INDUSTRY
Executed: 2018-02-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Euv Lithography System and Operating Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.