Patent Assignment
Reel/Frame 049267/0460
Assignment of Assignor's Interest
Recorded: 2019-05-23
Pages: 3
Assignors
ZHANG, QI
Executed: 2018-06-14
LU, XINLIANG
Executed: 2018-06-14
CHUNG, HUA
Executed: 2018-06-14
YANG, MICHAEL X.
Executed: 2018-06-14
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Generation of Hydrogen Reactive Species For Processing of Workpieces
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →