Patent Assignment
Reel/Frame 050065/0575
Assignment of Assignor's Interest
Recorded: 2019-08-15
Pages: 2
Assignors
ITO, TORU
Executed: 2019-06-13
MORI, MASAHITO
Executed: 2019-06-13
KANEKIYO, TADAMITSU
Executed: 2019-06-14
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Ashing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.