Patent Assignment
Reel/Frame 050434/0673
Assignment of Assignor's Interest
Recorded: 2019-09-19
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Dry Etching Apparatus and Dry Etching Method
Application:
16/495,652 →
Publication:
US 2021/0335625
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.