Patent Assignment
Reel/Frame 050680/0968
Assignment of Assignor's Interest
Recorded: 2019-10-10
Pages: 3
Assignors
HOU, LI
Executed: 2019-04-19
VANIAPURA, VIJAY M.
Executed: 2019-04-19
MENG, SHUANG
Executed: 2019-04-29
MA, SHAWMING
Executed: 2019-04-24
CHUNG, HUA
Executed: 2019-03-26
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
Application:
16/598,423 →
Publication:
US 2020/0135554
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 10, 2019
From: HOU, LI; VANIAPURA, VIJAY M.; MENG, SHUANG; MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 050681/0155 →
Assignment of Assignor's Interest
Oct 10, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050681/0292 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →