Patent Assignment
Reel/Frame 051102/0718
Assignment of Assignor's Interest
Recorded: 2019-11-25
Pages: 10
Assignors
KURE, SEIICHI
Executed: 2017-08-01
NAITOU, RYOUCHIROU
Executed: 2017-07-28
SHITE, HIDEO
Executed: 2017-07-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.