Patent Assignment
Reel/Frame 052096/0476
Corrective Assignment to Correct the Spelling of the Second Inventor's Name Previously Recorded on Reel 051102 Frame 0718. Assignor(S) Hereby Confirms the Assignment of the Assignor's Interest.
Recorded: 2020-03-05
Pages: 11
Assignors
KURE, SEIICHI
Executed: 2017-08-01
NAITOU, RYOUICHIROU
Executed: 2017-07-28
SHITE, HIDEO
Executed: 2017-07-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.