Patent Assignment
Reel/Frame 051318/0932
Assignment of Assignor's Interest
Recorded: 2019-12-18
Pages: 5
Assignors
DAI, FEN
Executed: 2019-01-22
WANG, TINGHAO
Executed: 2019-01-22
JAN, OLIVER D.
Executed: 2019-01-22
KIM, MOO-HYUN
Executed: 2019-01-29
MA, SHAWMING
Executed: 2019-01-29
LIU, ZHONGMING
Executed: 2019-01-24
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 18, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 051318/0983 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Assignment of Assignor's Interest
Feb 5, 2021
From: LIU, ZHONGMING
To: MATTSON TECHNOLOGIES, INC.
Reel/Frame 055167/0124 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →