Patent Assignment
Reel/Frame 055167/0124
Assignment of Assignor's Interest
Recorded: 2021-02-05
Pages: 4
Assignor
LIU, ZHONGMING
Executed: 2019-01-24
Assignee
MATTSON TECHNOLOGIES, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 18, 2019
From: DAI, FEN; WANG, TINGHAO; JAN, OLIVER D.; KIM, MOO-HYUN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 051318/0932 →
Assignment of Assignor's Interest
Dec 18, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 051318/0983 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →