Patent Assignment
Reel/Frame 052086/0012
Assignment of Assignor's Interest
Recorded: 2020-03-11
Pages: 7
Assignors
SHINODA, KAZUNORI
Executed: 2020-02-20
OTAKE, HIROTO
Executed: 2020-02-20
KOBAYASHI, HIROYUKI
Executed: 2020-02-20
KAWAMURA, KOHEI
Executed: 2020-02-20
IZAWA, MASARU
Executed: 2020-02-20
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Method and Etching Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.