Patent Assignment
Reel/Frame 052972/0982
Assignment of Assignor's Interest
Recorded: 2020-06-18
Pages: 7
Assignors
ZHANG, QI
Executed: 2020-04-07
LU, XINLIANG
Executed: 2020-02-10
CHUNG, HUA
Executed: 2020-03-26
YANG, HAICHUN
Executed: 2020-04-07
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Silicon Oxide Selective Dry Etch Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 18, 2020
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 052973/0018 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →