Patent Assignment
Reel/Frame 052973/0018
Assignment of Assignor's Interest
Recorded: 2020-06-18
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD., ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
Covered Property
(1)
Silicon Oxide Selective Dry Etch Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 18, 2020
From: ZHANG, QI; LU, XINLIANG; CHUNG, HUA; YANG, HAICHUN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 052972/0982 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →