Patent Assignment
Reel/Frame 053517/0520
Assignment of Assignor's Interest
Recorded: 2020-08-17
Pages: 5
Assignors
HUANG, YU-CHIH
Executed: 2019-10-02
HSU, CHE-CHANG
Executed: 2019-10-02
CHEN, LI-JUI
Executed: 2019-10-02
CHENG, PO-CHUN
Executed: 2019-10-14
YANG, CHI
Executed: 2019-10-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Monitoring Reflectivity of the Collector for Extreme Ultraviolet Radiation Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.