IP Library › Assignment 053517/0520
Patent Assignment
Reel/Frame 053517/0520

Assignment of Assignor's Interest

Recorded: 2020-08-17 Pages: 5
Assignors
HUANG, YU-CHIH
Executed: 2019-10-02
HSU, CHE-CHANG
Executed: 2019-10-02
CHEN, LI-JUI
Executed: 2019-10-02
CHENG, PO-CHUN
Executed: 2019-10-14
YANG, CHI
Executed: 2019-10-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property (1)
Apparatus and Method for Monitoring Reflectivity of the Collector for Extreme Ultraviolet Radiation Source
Application: 16/995,759 →
Publication: US 2020/0379357
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the Typographical Error in Inventor Cheng's Name Previously Recorded on Reel 053517 Frame 0520. Assignor(S) Hereby Confirms the Assignment. Sep 8, 2021
From: HUANG, YU-CHIH; YANG, CHI; HSU, CHE-CHANG; CHEN, LI-JUI
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 057438/0121 →