Patent Assignment
Reel/Frame 057438/0121
Corrective Assignment to Correct the Typographical Error in Inventor Cheng's Name Previously Recorded on Reel 053517 Frame 0520. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2021-09-08
Pages: 6
Assignors
HUANG, YU-CHIH
Executed: 2019-10-02
YANG, CHI
Executed: 2019-10-02
HSU, CHE-CHANG
Executed: 2019-10-02
CHEN, LI-JUI
Executed: 2019-10-02
CHENG, PO-CHUNG
Executed: 2019-10-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Monitoring Reflectivity of the Collector for Extreme Ultraviolet Radiation Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.