IP Library › Assignment 053630/0902
Patent Assignment
Reel/Frame 053630/0902

Assignment of Assignor's Interest

Recorded: 2020-08-28 Pages: 3
Assignors
ZHANG, QI
Executed: 2019-08-30
LU, XINLIANG
Executed: 2019-09-03
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property (1)
Methods For Processing a Workpiece Using Fluorine Radicals
Application: 17/001,728 →
Publication: US 2021/0066085
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Aug 28, 2020
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD.
Reel/Frame 053631/0093 →
Assignment of Assignor's Interest Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →